Curved lithography of a light detecting chip for a camera with a curved focal plane.
(suppose this one could actually make sense, someday, somewhere?)
curved electron beam lithography
Wondering a bit how sensitive you can go with (electron)photoresists. (probably other concerns complicate things..)
Ion-based lithography exists too, ions being the patterning, not the deposition or doping ( https://duckduckgo.com/?t=ffab&q=ion+lithography&ia=web )
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